ТЕТРАКИС (ЭТИЛМЕТИЛАМИНО) ТИТАНА

Description

Tetrakis(ethylmethylamino)titanium, Ti[N(CH₃)(C₂H₅)]₄, industry abbreviation TEMAT, is an organometallic titanium(IV) amide. Liquid volatile precursor for gas-phase deposition of titanium-containing films, primarily titanium nitride and oxide. Pyrophoric hazardous, reacts with water, supplied in qualifications up to 99.99% titanium.

Basic Attributes

• CAS No: 308103-54-0
• Chemical formula: C12H32N4Ti
• Molecular Weight: 280.28
• Exact weight: 280.2106377
• DSSTox ID: DTXSID10403326
• Density: 0.923 g/ml at 25 °C (literature data)
• Boiling point: 80 °C at 0.1 mm Hg. Art. (literary data)
• Product qualifications: 99%, 99+%, electronic grade at least 99.99%, PURATREM brand

Chemical nature and purpose

Four ethylmethylamide ligands are bound to titanium via nitrogen. The Ti–N bond is easily broken by proton reagents—water, ammonia, alcohols—which underlies deposition processes. Volatility at 80 °C and residual pressure 0.1 mmHg. Art. allows the substance to be supplied to the reactor in the vapor phase without thermal decomposition in the cylinder.

Scope of application

• Precursor for atomic layer and chemical vapor deposition of titanium nitride TiN films - barrier and electrode layers in microelectronics
• Deposition of titanium oxide films
• Formation of barrier layers in metallization of integrated circuits
• Source of titanium in organometallic synthesis

Safety Information

• GHS classification, signal word "Hazard": H225 (100%) - flammable liquid and vapor
• Full list of prescriptions according to the GHS classification: P210, P223, P231 + P232, P233, P240, P241, P242, P243, P260, P264, P280, P301 + P330 + P331, P303 + P361 + P353, P304 + P340, P305 + P351 + P338, P310, P321, P335 + P334, P363, P370 + P378, P402 + P404, P403 + P235, P405, P501
• Basis of classification: aggregated GHS data from 38 companies for 1 notification to the ECHA C and L register
• Transport codes: UN 3398, class 4.3, packing group I
• WGK Germany: 3
• Hazard class code: 11-14-34
• Safety instructions: 16-26-36/37/39-43-45
• Tags: F, C

Storage and handling

Packing group I according to class 4.3 - the highest degree of danger upon contact with water: the reaction occurs violently with the release of flammable gases. Code 14 in the hazard class means a violent reaction with water, code 34 means corrosive action, mark C confirms corrosive properties. Regulations P223, P231 + P232, P335 + P334, P370 + P378 specify the operating procedure: avoid contact with water, work and store in an inert atmosphere, extinguish only with dry agents, in case of contact with skin, remove dryly and cool. Store in a cool, ventilated place, without sources of ignition, the container is sealed and filled with inert gas. All operations are carried out in a glove box or on a sealed line; Instructions 43 and 45 require that you determine extinguishing agents in advance and, in the event of an accident, immediately consult a doctor showing the product data sheet.

Data note: Hazard statements H are not provided in a separate field on the card; the classification was restored from the “GHS Classification” block, where H225 is indicated with 100% coincidence of notifications.